Special Section on the Dynamics of MEMS and NEMS
نویسندگان
چکیده
منابع مشابه
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High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional dynamic measurement system based on stroboscopic and interferometric methods is presented. This system can capture bright-fielded and interferometric images ...
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Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication solution to the battery miniaturization problem, active DNA arrays and a wide variety of chemical and biological sensors. We established that it is possible to use C-MEMS to create very high aspect ratio carbon structures (e.g. posts with an aspect ratio...
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The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average app...
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ژورنال
عنوان ژورنال: Journal of Vibration and Acoustics
سال: 2017
ISSN: 1048-9002,1528-8927
DOI: 10.1115/1.4036699